Invest in the official JEDEC document. Integrate its test structures into your photomask set. Train your technicians on its specific ramp rates. When you finally hit "start test" on the wafer prober, you can be confident that your breakdown results will be accepted by foundries, automotive customers, and space agencies worldwide.
The standard specifies a chuck temperature tolerance (e.g., 25°C ± 2°C or 125°C ± 5°C). Testing an oxide at room temperature versus 125°C changes the breakdown voltage by nearly 15%. jesd794d pdf
If you set compliance current too high (e.g., >100 µA), thermal runaway destroys the dielectric before you measure the intrinsic breakdown. Too low (<10 nA) triggers false failures due to charging. JESD794D provides specific ranges based on oxide thickness. Invest in the official JEDEC document